[2] Low-resistivity ruthenium metal thin films grown via atomic layer deposition using dicarbonyl‐bis(5‐methyl‐2,4‐hexanediketonato)ruthenium(II) and oxygen. Materials Science in ...

Properties, sources and uses of the element ruthenium. Discovery: Ruthenium’s discovery is generally credited to Karl Ernst Klaus in 1844.Nearly 20 years before, however, Jöns Berzelius and ...